80 FR 48 pgs. 12934-12935 - Mandatory Greenhouse Gas Reporting
Type: RULEVolume: 80Number: 48Pages: 12934 - 12935
Pages: 12934, 12935FR document: [FR Doc. 2015-05549 Filed 3-11-15; 8:45 am]
Agency: Environmental Protection Agency
Official PDF Version: PDF Version
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ENVIRONMENTAL PROTECTION AGENCY
40 CFR Part 98
Mandatory Greenhouse Gas Reporting
CFR Correction
In Title 40 of the Code of Federal Regulations, Parts 96 to 99, revised as of July 1, 2014, on pages 696 through 698, in subpart I of part 98, tables I-5 through I-7 are corrected to read as follows:
| Process type factors | Process gas i | CF 4 | C 2 F 6 | CHF 3 | CH 2 F 2 | C 3 F 8 | c- C 4 F 8 | NF 3 Remote | NF 3 | SF 6 | C 4 F 6a | C 5 F 8a | C 4 F 8 O a |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Etch 1-U i | 0.7 | 1 0.4 | 1 0.4 | 1 0.06 | NA | 1 0.2 | NA | 0.2 | 0.2 | 0.1 | 0.2 | NA | |
| Etch BCF 4 | NA | 1 0.4 | 1 0.07 | 1 0.08 | NA | 0.2 | NA | NA | NA | 1 0.3 | 0.2 | NA | |
| Etch BC 2 F 6 | NA | NA | NA | NA | NA | 0.2 | NA | NA | NA | 1 0.2 | 0.2 | NA | |
| CVD Chamber Cleaning 1-U i | 0.9 | 0.6 | NA | NA | 0.4 | 0.1 | 0.02 | 0.2 | NA | NA | 0.1 | 0.1 | |
| CVD Chamber Cleaning BCF 4 | NA | 0.1 | NA | NA | 0.1 | 0.1 | 2 0.02 | 2 0.1 | NA | NA | 0.1 | 0.1 | |
| CVD Chamber Cleaning BC 3 F 8 | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | 0.4 | |
| Notes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas. This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-type or process type. | |||||||||||||
| 1 Estimate includes multi-gas etch processes. | |||||||||||||
| 2 Estimate reflects presence of low-k, carbide and multi-gas etch processes that may contain a C-containing fluorinated GHG additive. | |||||||||||||
| Process type factors | Process gas i | CF 4 | C 2 F 6 | CHF 3 | CH 2 F 2 | C 3 F 8 | c- C 4 F 8 | NF 3 Remote | NF 3 | SF 6 |
|---|---|---|---|---|---|---|---|---|---|---|
| Etch 1-U i | 0.6 | NA | 0.2 | NA | NA | 0.1 | NA | NA | 0.3 | |
| Etch BCF 4 | NA | NA | 0.07 | NA | NA | 0.009 | NA | NA | NA | |
| Etch BCHF 3 | NA | NA | NA | NA | NA | 0.02 | NA | NA | NA | |
| Etch BC 2 F 4 | NA | NA | 0.05 | NA | NA | NA | NA | NA | NA | |
| CVD Chamber Cleaning 1-U i | NA | NA | NA | NA | NA | NA | 0.03 | 0.3 | 0.9 | |
| Notes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas. This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-type or process type. | ||||||||||
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| Process type factors | Process gas i | CF 4 | C 2 F 6 | CHF 3 | CH 2 F 2 | C 3 F 8 | c- C 4 F 8 | NF 3 Remote | NF 3 | SF 6 |
|---|---|---|---|---|---|---|---|---|---|---|
| Etch 1-U i | 0.7 | 0.4 | 0.4 | NA | NA | 0.2 | NA | NA | 0.4 | |
| Etch BCF 4 | NA | 0.2 | NA | NA | NA | 0.1 | NA | NA | NA | |
| Etch BC 2 F 6 | NA | NA | NA | NA | NA | 0.1 | NA | NA | NA | |
| CVD Chamber Cleaning 1-U i | NA | 0.6 | NA | NA | 0.1 | 0.1 | NA | 0.3 | 0.4 | |
| CVD Chamber Cleaning BCF 4 | NA | 0.2 | NA | NA | 0.2 | 0.1 | NA | NA | NA | |
| Notes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas. This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-type or process type. | ||||||||||
[FR Doc. 2015-05549 Filed 3-11-15; 8:45 am]
BILLING CODE 1505-01-D